FIB

To conclude, the mass and position of multiple particles can be determined in a step-wise manner by monitoring the frequency changes after and prior to the attachment of each particle on a cantilevered micro-plate. The proposed method has been verified by sequentially identifying concentrated particles attached to a Si micro-plate through simulations and experiments. From the extracted outcomes, it can be argued that the proposed theoretical framework possesses a relatively higher detection precision than the traditional method and unique properties in detecting the two-dimensional position.

A simple and theoretical model using the flexural and torsional vibrations of micro-plates was proposed to simultaneously identify the mass and position of the attached particle by the vibration of a micro-plate.It is found that our strategy offers the unique specialty in the two-dimensional position (in width and length directions) detection, and is of wide adaptability for microcantilevers with arbitrary aspect ratios.