The proposed strategy in mass sensing was validated by extracting the concentrated mass and its position using simulated and experimental results on a micro-diaphragm resonator.
This finding is verified numerically in finite element modeling using a freestanding circular diaphragm with and without an added particle, and it proves that the method resolves the particle position and mass with high accuracy.
We present a generalized theoretical analysis of the vibration of a micro/nano bridge resonator with a particle at an arbitrary location by considering the combined effect of the beam stiffness and string tension in the resonator. By combining resonant frequencies of at most three consecutive symmetric vibration modes, the developed model can unambiguously resolve the particle mass and position.