The theoretical model and novel analytical solution are of interest in the design of micro-diaphragm-based biosensing devices.
A simple and theoretical model using the flexural and torsional vibrations of micro-plates was proposed to simultaneously identify the mass and position of the attached particle by the vibration of a micro-plate.It is found that our strategy offers the unique specialty in the two-dimensional position (in width and length directions) detection, and is of wide adaptability for microcantilevers with arbitrary aspect ratios.
The results indicate that the mode shape change due to adsorption of a relatively large particle can influence the performance of the nanomechanical resonator considerably.
This finding is verified numerically in finite element modeling using a freestanding circular diaphragm with and without an added particle, and it proves that the method resolves the particle position and mass with high accuracy.