FSI

Dynamic characteristics of a prestressed micro-diaphragm in a fluid subjected to distributed mass loading

The theoretical model and novel analytical solution are of interest in the design of micro-diaphragm-based biosensing devices.

Effects of residual stress and fluid loading on vibrations of a micro-diaphragm on a free fluid surface

The proposed framework will shed new light on the fundamental understanding of numerous applications involving resonating sensors in contact with the surrounding fluid in a broad sense.

Mode dependent fluid damping in pre-stressed micro-diaphragm resonators

The investigation proves that it is necessary to adopt exact mode shapes, instead of approximate mode shapes, to ensure the accuracy in the theoretical evaluation of the vibration of the diaphragm in the fluid. Furthermore, the quality factor associated with acoustic radiation losses is mode dependent, and its dependency on the mode number shows plate, membrane, and plate-membrane transition behaviors as pre-stress varies.